산업포털여기에

특징

- Measuring range : 50μS~20mS
- Applications : Silicon ingot, Silicon bulk, Prismatic shape (JIS code)
- Bulk sizes : Contact us in details

상세설명

- Minority carrier lifetime tester for silicon Ingot
  (잉곳 소수 캐리어 수명 측정장치)

- JIS direct current anodizing method

- Photoconductive decay method

- Global standard model for the lifetime test of silicon bulk

- Data processing by digital oscilloscope and PC
   (dedicated software)

특징

- Rs : 0.01~3000 Ω/sq 
 - Applications : Conductive layers on glass or film
 - Sample sizes : Contact us in details

상세설명

- Automatically measures sheet resistance

- For ITO, metal and conductive layers on film or glass

- Easy operation with PC

- System is designed for small footprint in clean room

- Non-contact Eddy current air floating single probe


* Line scan measurement video (9 point measured)*
https://www.youtube.com/watch?v=GD2IJQA0tvs&feature=player_embedded

*Point measurement video (9 point measured)*
https://www.youtube.com/watch?v=8VFKh62WyqA&feature=player_embedded

특징

- Rs:5.0mΩ/sq~10.0MΩ/sq
- Res:1.0mΩ?cm ~300kΩ?cm ( t=100~2000μm )
- Applications : Silicon wafer, conductive layer on glass/film and more
- Sample size : 2"~8"Ф, max.156mmSQ

상세설명

- All-in-one instrument of resistivity tester and measuring stage 
  (Small foot print)

- Without PC operation (stand-alone use) or PC operate system type 
   is available

- Shutter mechanism guard measurement from outside influence

- Round and square shape measuring pattern programmable
  (in use PC operate)

- Tester self-test function, wide measuring range

- Thickness, edge, temperature correction for silicon wafer

- Film thickness conversion function from sheet resistance (in use PC operate)

- Mapping software: Up to 1,225 points (Option)

특징

-Res : 10μ~100k?Ωcm
-Applications : Semiconductor materilas, Solar-cell materials (Silicon, Polysilicon, SiC etc)
                    Conductive thin film (Metal, ITO etc)
                    Others (*Please contact us for details)
-Sample sizes : φ10mm or 5mmX10mm~35mmX35mm or others

상세설명

- Controlled Thermo-chuck (room temperature～600℃/less than 20 minutes)

- 600C compatible probe head with 1mm linear

- Controlled with vacuum sensor, digital thermo-meter,
   vacuum gauge and gas flow meter

- Temperature measuring accuracy：±（0.5% + 1℃）

특징

-Thickness : 200 ?1200μm / Bow : +/-350μm / Warp : 350μm
- Applications : Semiconductor materilas, Solar-cell materials (Silicon, Polysilicon, SiC etc)
                    Silicon-related epitaxial materials, Ion-implantation sample
                    Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc) 
- Sample sizes : 3~8 inch

상세설명

- Measures Thickness, TTV, Bow, Warp and site and global Flatness (ASTM compliance)

- Measures all materials including Si, GaAs, Ge, InP, SiC

- Full 500 micron thickness measurement range without re-calibration

- 2-D /3-D Mapping software