Cooling Water Flow rate Temperature Cooling water heat radiation
1 gal/min. (3.8L/min.) Inlet 10℃ to 27℃ 2.6 kw
Environment Temperature Humidity
5℃ to 40℃ 30% to 95%
Noise
Max. 70 dB (A)
Certifications
CE Mark
Meets the requirements of European Directive on Electromagnetic Compatibility (89/336/EEC) and Low Voltage Directive(73/23/EEC)
SEMI
Meets SEMI-S2 Environmental, Health, and Safety Guidelines for Semiconductor Manufacturing Equipment, and SEMI-S8 Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment.