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MFC

2014. 6. 10. 09:59 : 측정/계측/검사/시험

Available to concurrently connect with MFC and CDG
Channel : max. 8ch. Including MFC and CDG.
MFC Controller : KMC300/CDG Controller : KPC400
Display Resolution : 4 Digit 7 Segment, Adjustable Decimal Location
Display Repeatability : ± 0.1% of Full Scale
Analog output signal : 0 to 5 Volts for MFC
0 to 10Volts available for CDG by user requirement.
Output Power : ± 15 VDC (0.5 Amp)
Units of Display : SCCM, SLM, % for MFC
Torr & Pa for CDG
Standard function : Remote control, RS485 for each channel.
Relay 1-setpoint for each channel.
Optional : Pressure control, which is available to automatically control connected MFC by CDG’s setting pressure
Input power : 85Vac ~ 265Vac (50/60Hz)
Mounting rack type : 1/4 rack, Half rack, Full rack(19”)
                                 1/4” Rack : 1channel only (Optional : Half Rack or Full Rack)
                                 Half Rack : 2channel ~ 4channel(Optional : Full Rack)
                                 Full Rack : 5channel ~ 8channel