| 제품코드 | G046049 | |
|---|---|---|
| 판매 회사명 | (주)피앤테크 | |
| 연락처 | 043-211-3917 | |
| 홈페이지 | - | |
| 제품홍보관 | http://blog.yeogie.com/p-tech2000 |
| PF-D81 Furnace System |
| Semiconductor Process Application - Wet/Dry Oxidation - N2/H2 Sinter - Anneal - Poly - Nitride - HTO |
PF-D81 Series System Features
-Wafer size : 125mm,150mm, 200mm
- Load Capacity : 75 Wafers
- Thermal uniformity accuracy :
* Between 400℃ and 800℃ ±1℃
* Between 800℃ and 1150℃ ±0.5℃
- Ramp rate : 0.1~ 25℃ per minute
- Thermal uniformity accuracy :
* Between 400℃ and 800℃ ±1℃
* Between 800℃ and 1150℃ ±0.5℃
- Ramp rate : 0.1~ 25℃ per minute
- Operating temperature range : 400℃ ~ 1150℃
- Boat Speed : 3~125 cm / minute
- 3 Zone by Spikes and Profile T/C
- Boat Speed : 3~125 cm / minute
- 3 Zone by Spikes and Profile T/C
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