산업포털여기에

• Total Industry
• Precision Gas Blending & Analyzing
• Gas Injection on Surface treatment Indusry (PVD, CVD, Reactor, etc)
• Semiconductor Indusry
• Component Leak Detection
• Research and Development
• High ressure Industry
• Optical Fiber
• Fuel Cell
• Reactor System
• Gas mixing System
• Laboratory

• Available to concurrently connect with MFC and CDG
  Channel : max. 8ch. Including MFC and CDG.
• MFC Controller : KMC300/CDG Controller : KPC400
  Display Resolution : 4 Digit ­ 7 Segment, Adjustable Decimal Location
• Display Repeatability : ± 0.1% of Full Scale
• Analog output signal : 0 to 5 Volts for MFC
                                     0 to 10Volts available for CDG by user requirement.
• Output Power : ± 15 VDC (0.5 Amp)
• Units of Display : SCCM, SLM, % for MFC
                             Torr & Pa for CDG
• Standard function : Remote control, RS485 for each channel.
                                 Relay 1-setpoint for each channel.
• Optional : Pressure control, which is available to automatically control connected MFC by CDG’s setting pressure
• Input power : 85Vac ~ 265Vac (50/60Hz)
• Mounting rack type : 1/4 rack, Half rack, Full rack(19”)
                                   1/4” Rack : 1channel only (Optional : Half Rack or Full Rack)
                                   Half Rack : 2channel ~ 4channel(Optional : Full Rack)
                                   Full Rack : 5channel ~ 8channel

• Measurement Range:10 ~ 1.0E-3Torr
• Gas Calibration : Air or N2
• Sensor type : Thermal conductive
• Bake Out Temp : 100℃ in Air Vacuum
• Cable : 9pin D-Sub Connector, Multi Conductor Shield Cable
• Cable length : 3m(Standard), 50m(Maximum)
• Fitting : 1/8 NPT, NW16, NW25, 15m O.D, 1.33" CF, 2.75"CF, 1/4" VCR

ATM SHIM Gauge는 PIRANI와 Piezo Sensor가 연동하여 작동합니다.
Piezo Sensor를 사용하여 가스밀도에 영향을 받는 1Torr 이상에서 보다 정밀한 진공도를 확인할 수 있습니다.

• Measurement Range:1500 ~ 1.0E-3Torr
• Gas Calibration : Air or N2
• Bake Out Temp : 100℃ in Air Vacuum
• Cable : 9pin D-Sub Connector, Multi Conductor Shield Cable
• Cable length : 3m(Standard), 50m(Maximum)
• Fitting : 1/8 NPT, NW16, NW25, 15m O.D, 1.33" CF, 2.75"CF, 1/4" VCR
• Gauge Axis must be horizontal to provide accurate measurement above 1 Torr

• Measurement Range:1000 ~ 1.0E-3Torr
• Gas Calibration : Air or N2
• Bake Out Temp : 100℃ in Air Vacuum
• Cable : 9pin D-Sub Connector, Multi Conductor Shield Cable
• Cable length : 3m(Standard), 50m(Maximum)
• Fitting : 1/8 NPT, NW16, NW25, 15m O.D, 1.33" CF, 2.75"CF, 1/4" VCR
• Gauge Axis must be horizontal to provide accurate measurement above 1 Torr